Two Chamber System

Dosing system

A proximity probe is used when the accuracy of the dosages depends on small bath fluctuations.

Advantages:

  • no oxide build-up
  • inexpensive

Charging system

A submerged probe is used in the fusion chamber for greater fluctuations in the charging.

Monitoring with a submerged and a proximity probe 1 electronic control system for Low-cost system for simple process cycles:

 

Alt. solution: Monitoring with a submerged and a proximity probe 2 electronic control systems for flexible measuring possibility for independent process cycles: